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We provide a range of products and solutions, ranging from our compact PVD solution to our 300mm ALE/ICP/RIE platform. Our platforms are affordable, compact and extremely versatile.

About us
Compact Plasma is a privately held company, founded by a number of professionals with an accumulated experience in the semiconductor industry exceeding 100+ years.
Compact Plasma is focused on supplying equipment for plasma etch and deposition of thin films, primarly in the research and development field, i.e. the academic world, and leading research laboratories within the tier-one manufacturers of semiconductors in the world.
Our innovation allows you to accelerate your development efforts, at a significantly lower cost than before. Without sacrificing quality, performance and user friendliness.